VHP+ Robot Arm for Ultima PVD
Short lead time(3~5 days) for repair by local parts sourcing
 
 

Specification

Equipment : Ultima
Process : PVD
Wafer size : 300mm
Repeatability Precision : within ±0.1mm
 

Repair Ass’y

Elbow
300mm Pivot

Repair Know-how

Repeatability and Moving Test by exclusive performance
    Test system
 
 
Repair Process
 
 
 
 
 
 
 
 
98-46, Dongtansandan 7-gil, Dongtan-myeon, Hwaseong-si, Gyeonggi-do, 18487,Korea | TEL :+82-31-373-4689 | FAX :+82-31-373-4689 | E-mail :hgs@happysolution.co.kr
COPYRIGHT(C) HAPPY GLOBAL SOLUTION CO.,LTD ALL RIGHTS RESERVED