TM Robot for 4~4.5G Glass Transfer

Position control of Scara Blade 3-axis by Harmonic Driver, Stepping Motor

2-axis of Harmonic, Z-axis Stepping Motor

 
 

Specification

Equipment : Ulvac
Process : Crystallization
Glass Size : 4~4.5G
Environment : Vacuum
Repeatability Precision : within ±0.3mm
 

Repair Ass’y

Motor
Arm

Repair Know-how

Repeatability and Moving Test by exclusive performance
    Test system
 
 
 
 
Repair Process
 
 
 
 
 
 
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