Wafer Transfer Robot
Arm moving by 3ph, AC Servo Motor(4 EA)
Position control of Dual Blade 4-axis by DD(Direct Drive) Motor
NSK Motor of High speed and High Torque
Ceramic Bearing(for Hub, Arm, Pivot) for high temp. and vacuum
 
 

Specification

Equipment : AMAT Endura
Process : Metal
Wafer Size : 300mm Only
Environment : Vacuum
Repeatability Precision : within ±0.1mm
 
 

Repair Ass’y

Motor
Hub (XP, VXP)
Elbow
300mm Pivot
 

Repair Know-how

Improvement in Vibration, Repeatability, Precision,
    Backlash
Pivot remodeling for improvement of Particle issue
Repeatability precision and Moving Test by exclusive
    performance Test system
Repair Process
 
 
 
 
 
 
 
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